ECE 541 - Microelectronic Fabrication Techniques

Description:    Credit 4. Current fabrication techniques of microelectronic technology; plasma and CVD processes; etching techniques; ion implantation; surface analytical methods.

Prerequisite:  ECE 347 or ECE 449

Textbooks: "Silicon VLSI Technology: Fundamentals, Practice and Modeling," by James Plummer, Michael Deal, and Peter Griffin.

Topics:

  • Plasma Techniques 
  • CVD Processes 
  • Etching Techniques 
  • ION Implanation 
  • Surface Analytical Methods 
  • Current Processing Methods