Credit 4U/5G. Microfabrication techniques for microsensors, microstructures,
and microdevices. Selected examples of physical/chemical sensors and actuators.
ECE 347 or consent of instructor
Textbooks: "Micromachined Transducers Sourcebook," by Gregory Kovacs.
Audet, "Silicon Sensors," Academic Press, 1989.
Processing," McGraw Hill, 1987.
a. taxonomy of transducers, introduction to device fabrication
b. scaling effects,physical limits of microfabrication.
a. bulk micromachining
b. surface micromachining
c. reactive sputtering
d. the LIGA process
a. silicon pressure sensor
b. silicon microaccelerometer
c. comb-drive electrostatic actuators.
a. Clark oxygen microelectrode
b. Ultrathin platinum film glucose sensor
c. Light addressable potentiometric sensors.
d. Transducer Interface Circuits