ECE 400 - Introduction to Microelectromechanical Systems

Description:  Credit 3U/4G. Definition, classification and case studies of transducers, sensors and actuators.  Microfabrication methods for microelectromechanical systems (MEMS).  Design, simulation and modeling of MEMS.

Prerequisite: ECE 346

Textbooks:  G.T.A. Kovac, "Micromachined Transducers Sourcebook, " McGraw Hill, 1998.


Definitions of transducers and sensors

Classification of sensors

Signal conversion

Ideal characteristics of sensors

Scalling laws

Summary of microfabrication methods for MEMS

Basic semiconductor device theory and P/N junction

Sensing principles - electrical sensors

Sensing principles - magnetic sensors

Basic theoretical mechanics concepts

Cantilever beams - static bending

Sensing principles - mechanical sensors

Device Case - study - pressure sensor

Sensing principles - thermal sensors and heat transfer

Device Case - study - flow sensor

Actuation principles

Sensor signals and interface electronics

Design and simulation

Design and modeling